Mass Flow Controller with EtherCAT & CAN Connectivity

Mass flow controllers (MFCs) are essential for precise gas flow control in applications such as semiconductor manufacturing and industrial burners. They measure and regulate gas flow rates to help maintain process accuracy and efficiency. As industrial automation requirements continue to evolve, modern controllers must support industrial network connectivity for control, monitoring, and communication.

This design utilizes Renesas 32-bit MCUs that integrate system control and industrial network interfaces, including Ethernet for Control Automation Technology (EtherCAT^®) and controller area network (CAN), on a single chip. This architecture enables compact, cost-effective, and reliable mass flow control systems that can be easily integrated into industrial networks. Large on-chip memory supports fast data processing and enhances overall system performance.

System Benefits:

• The MCUs feature EtherCAT slave controllers and CAN interfaces, enabling seamless integration into industrial networks for efficient communication and process control.
• Supports industrial networking with sample software for EtherCAT and DeviceNet^®, helping reduce development effort and accelerate deployment.