Pirani Vacuum Gauge

The Pirani vacuum gauge system measures vacuum pressure using the principle of thermal conductivity. It uses a heated filament that also functions as a temperature sensor, enabling precise vacuum pressure measurements. As one of the most widely used vacuum gauge types, this sytem is commonly employed in industries such as semiconductor manufacturing, medical devices, pharmaceuticals, and food processing, where accurate and reliable vacuum measurements are critical. The same thermal conductivity principles are also applied in thermal flow sensing, broadening the scope of this technology.

This sytem features an MCU with a high-precision analog front-end that integrates a 24-bit ΔΣ ADC, a 16-bit DAC, and excitation current sources. This design enables a compact and accurate Pirani vacuum gauge with minimal external components.

System Benefits:

• High-speed, high-precision measurement of temperature and power using a 24-bit ΔΣ ADC with up to 125kSPS sampling rate.
• Current control enabled by a 16-bit DAC.
• Digital temperature control utilizing the RXv2 core’s built-in FPU.