Mass Flow Controller with EtherCAT & CAN Connectivity

Mass flow controllers (MFCs) are essential for precise gas flow control in applications such as semiconductor manufacturing and burners. They measure and control the mass and flow rate of fluids. With the growing demand for efficient industrial processes, modern controllers must support industrial network connectivity for control functions and communication.

This design utilizes the Renesas' 32-bit MCU which integrates both system control and industrial network interfaces, such as Ethernet for Control Automation Technology (EtherCAT) and Controller Area Network (CAN), on a single chip. This addresses the industry's need for compact, cost-effective, and reliable mass flow control systems that can easily be integrated into industrial networks. The MCU's large built-in memory ensures faster data processing and improved overall system performance.

System Benefits:

• The MCU features an EtherCAT slave controller and CAN, enabling seamless integration into industrial networks for efficient communication and process control.
• Supports industrial network solutions with sample software for EtherCAT and DeviceNet, reducing development time and enabling faster deployment.