Mass flow controllers measure the mass and flow rate of a fluid, as well as control the flow rate. These are used for gas control of semiconductor manufacturing equipment and burners. The RX72M 32-bit microcontroller (MCU) has a large amount of built-in memory and EtherCAT and control area network (CAN) interfaces. With this reference design, the system control and industrial network can be controlled with one chip.

System Benefits:

  • The MCU has an EtherCAT slave controller and CAN, and supports industrial networks
  • Provides industrial network solutions, including EtherCAT and DeviceNet sample software



Winning Combinations Interactive Diagram

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Template 1 Connector Line Connector Line.181 Connector Arrow JP123 JP123 JP123 3.3V.52 3.3V 3.3V Buck Regulator Buck Regulator Buck Regulator 24V 24V 24V Input arrow EEPROM EEPROM EEPROM Bi-directional Transceiver Transceiver Transceiver Bi-directional.68 Connector Arrow.69 Connector Arrow.70 Connector Arrow.72 Op Amp Op Amp Op Amp Flow Sensor Flow Sensor Flow Sensor Connector Line.75 Flow Signal Flow Signal Flow Signal Connector Arrow.77 Bi-directional.78 To Bus To Bus To Bus PHY PHY PHY PHY.81 PHY PHY Piezo Actuator Piezo Actuator Piezo Actuator Bi-directional.83 Bi-directional.84 Bi-directional.85 Bi-directional.86 Bi-directional.87 Sheet.129 Sheet.89 Sheet.128 Sheet.90 Sheet.91 Sheet.92 Sheet.93 Sheet.94 Sheet.95 Sheet.96 Sheet.97 Sheet.98 Sheet.99 Sheet.100 Sheet.101 Sheet.102 Sheet.103 Sheet.104 Sheet.105 Sheet.106 Sheet.107 Sheet.108 Sheet.109 Sheet.110 Sheet.111 Sheet.112 Sheet.113 Sheet.114 Sheet.115 Sheet.116 Sheet.117 Vertical Wire Bundle Label Text 10pt.1046 Sheet.132 LED LED LED MOSFET Sheet.156 N-Channel MOSFET Sheet.135 Sheet.136 Sheet.137 Sheet.138 Sheet.139 Sheet.140 Sheet.141 Sheet.142 Sheet.143 Sheet.144 Sheet.145 Sheet.146 Sheet.147 Sheet.148 Connect.50 Sheet.150 Sheet.151 Sheet.152 Connector Arrow.158 Connector Arrow.161 EtherCAT EtherCAT EtherCAT Connector Arrow.163 Gas Flow Gas Flow GasFlow 3.3V 3.3V 3.3V Sheet.177 Sheet.168 Sheet.169 Sheet.170 Sheet.171 Sheet.172 Sheet.173 Sheet.174 Sheet.175 Connector Arrow.178 Connector Line.182 Connector Line.183 Valve Valve Valve Sheet.185 MCU MCU MCU EtherCAT Slave EtherCAT Slave EtherCAT Slave GPIO GPIO GPIO UART UART UART UART UART UART I2C I2C I2C 12 bit ADC 12 bit ADC 12 bit ADC
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