The FS1023 comprise a MEMS flow sensor mounted on a circuit board with an amplification circuit and a flow housing.

The FS1023 is capable of measuring liquid mediums. The sensor utilizes thermopile sensing, which provides an excellent signal-to-noise ratio and is ideal for applications requiring low power. It is highly sensitive at low flow rates with a very fast response time.

The set of upstream and downstream thermopiles can be used independently in a single-ended circuit or connected together in a differential configuration. Each upstream and downstream thermopiles are connected to an amplifier with a 0V to 4.5V output.

Features

  • Measures liquid mediums
  • Robust solid isolation technology
  • No cavity in MEMS sensor to cause clogging
  • Resistant to vibration and pressure shock
  • Low power application
  • Fast response time
  • 0V to 4.5V output
  • Supply voltage: 5V DC
  • Operating temperature range: 0°C to +85°C

Product Options

Part Number Part Status Description Temp. Range Buy Sample
FS1023
Package Info
 Not Recommended for New Designs Liquid, 0 to 3 SLPM 0 to 70°C
Availability

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Documentation & Downloads

Title Other Languages Type Format File Size Date
Datasheets & Errata
FS1023 Datasheet – Datasheet PDF 360 KB
Other
Sensing Technologies and Sensor Solutions Overview – Overview PDF 5.75 MB
FS10xx/FS2012 High-Performance MEMS Flow Sensor Module Family – Product Brief PDF 236 KB
info: For device-specific or order-specific documentation, submit a support request.

Boards & Kits

Part Number Title Type Company
SDAF0x Mass Flow Sensor Evaluation Kit Evaluation Renesas

News & Additional Resources

Type Date
High-Accuracy Oxygen Flow Meter for the Exploration Portable Life Support System External Link Nov 2, 2020
Why Reinvent Turbine Wheel-Style Flow Meters? Blog Post Oct 19, 2017
IDT Expands Sensor Portfolio with Solid-State Flow Sensor Modules for Liquids and Gases News Jul 24, 2017