Features
- Measures gas or liquid mediums
- Robust solid isolation technology
- No cavity in MEMS sensor to cause clogging
- Resistant to vibration and pressure shock
- Low power application
- Fast response time
- Millivolt output
- Heater supply voltage: 3V to 5V DC
- Operating temperature range: 0°C to +85°C
Description
The FS1012 comprise a MEMS flow sensor mounted on a circuit board with a flow housing. It features a 6-pin standard header connected directly to the MEMS flow sensor.
The FS1012 is capable of measuring a non-corrosive gas or liquid medium. The sensor utilizes thermopile sensing, which provides an excellent signal-to-noise ratio and is ideal for applications requiring low power. It is highly sensitive at low flow rates with a very fast response time.
The set of upstream and downstream thermopiles can be used independently in a single-ended circuit or connected together in a differential configuration.
| Part Number | Status | Samples | Stock | Package | Lead Count (#) | Carrier Type | Description | Flow Rate (SLPM) | Pb (Lead) Free | Pb Free Category | Temp. Range (°C) |
|---|---|---|---|---|---|---|---|---|---|---|---|
| FS1012-1001-LQ | Obsolete | N/A | Out of Stock | MODULE | 0 | Tray | Liquid, 0 to 0.5 SLPM | 0.5 | Yes | e0 | 0 to 85°C |
| FS1012-1002-LQ | Obsolete | N/A | Out of Stock | MODULE | 0 | Tray | Liquid, 0 to 1.0 SLPM | 1 | Yes | e0 | 0 to 85°C |
| FS1012-1020-NG | Obsolete | N/A | In Stock | MODULE | 0 | Tray | Gas, 0 to 2 SLPM | 2 | Yes | e0 | 0 to 85°C |
| FS1012-1100-NG | Obsolete | N/A | Out of Stock | MODULE | 0 | Tray | Gas, 0 to 10 SLPM | 10 | Yes | e0 | 0 to 85°C |
Filters
Applied Filters
- Application NotePDF 135 KB R36AN0015EU0100 Rev.1.00 Jun 26, 2023AI-generated Summary: Thermal flow sensors measure fluid flow rates by detecting heat transfer changes caused by fluid movement across a micro-heater and temperature sensors. Accuracy depends on factors such as fluid composition, ambient temperature, pressure, humidity, and flow profile. Variations in fluid thermal properties or environmental conditions can alter sensor readings. Calibration is specific to certain fluids, with conversion factors available for others. Proper sensor placement and flow conditioning improve measurement reliability despite turbulent or laminar flow variations.
- End Of Life NoticePDF 1.29 MB Jan 31, 2023
- Product Change NoticePDF 148 KB Jul 01, 2021
- White PaperPDF 478 KB 7WDXRDKU4E7E-5-62488 Nov 15, 2017Reviewing the rise of MEMS-type thermal mass flow sensors, the paper highlights their advantages over traditional designs, including high sensitivity, miniaturization, scalability, and lower cost through calorimetric technology. Porous silicon with a silicon carbide coating increases robustness for use with various gases and liquids.
- Product BriefPDF 236 KB 7WDXRDKU4E7E-6-61552 Aug 23, 2018
Recommended Documents (1)
Datasheets (1)
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- Application NotePDF 135 KB R36AN0015EU0100 Rev.1.00 Jun 26, 2023AI-generated Summary: Thermal flow sensors measure fluid flow rates by detecting heat transfer changes caused by fluid movement across a micro-heater and temperature sensors. Accuracy depends on factors such as fluid composition, ambient temperature, pressure, humidity, and flow profile. Variations in fluid thermal properties or environmental conditions can alter sensor readings. Calibration is specific to certain fluids, with conversion factors available for others. Proper sensor placement and flow conditioning improve measurement reliability despite turbulent or laminar flow variations.
- White PaperPDF 478 KB 7WDXRDKU4E7E-5-62488 Nov 15, 2017Reviewing the rise of MEMS-type thermal mass flow sensors, the paper highlights their advantages over traditional designs, including high sensitivity, miniaturization, scalability, and lower cost through calorimetric technology. Porous silicon with a silicon carbide coating increases robustness for use with various gases and liquids.
Application Notes & White Papers (2)
- End Of Life NoticePDF 1.29 MB Jan 31, 2023
- Product Change NoticePDF 148 KB Jul 01, 2021
Product Notices (PCN, EOL, etc) (3)
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- Product BriefPDF 236 KB 7WDXRDKU4E7E-6-61552 Aug 23, 2018
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News & Blog Posts
Support Communities
-
How to appropriately connect the FS1012-1002-C01-LQ to a Opamp and to the arduino?
Hello, I recently acquired the FS1012-1002-C01-LQ flow rate sensors for my thesis experimentation setup and I have been having troubles with the output voltage readings in my Arduino. I was wondering if I could be helped with this. I will provide more information. My experimental setup consists ...
Mar 18, 2023 -
How to use FS1012 Flow sensor
Hi, I have got new FS1012 thermal flow sensor for gas flow sensing. I have only sensor with me, no other MCU or any guide how to interface it. Can some one help me with the selection of MCU and software to be used. I just want to get the ...
Aug 11, 2021 -
FS1012 flow output tables
Dear Sir/Madam, We use the following sensors in our device: - FS1012-1020-NG - FS1012-1100-NG Can you please send us the tables from these sensors? We need it especially from FS1012-1020-NG. So that we can then convert the outputvoltage into a flow. Thank you very ...
Dec 1, 2023