The HS3101 is a highly accurate, fully calibrated relative humidity and temperature sensor. The MEMS sensor features a proprietary sensor-level protection ensuring high reliability and long-term stability. The hydrophobic membrane covering the lid inlet port prevents particles and liquids from entering the sensor and compromising the performance.


  • RH accuracy: ±1.5%RH, typical (10 to 90%RH, 25°C)
  • Hydrophobic membrane, IP67 rating
  • 14-bit resolution: 0.01%RH, typical 
  • Fast RH response time: 4 seconds, typical
  • Temperature sensor accuracy: ±0.2°C, typical (-10 to +80°C)
  • Low current consumption: 1.0µA average (8-bit resolution, 1.8V supply), 24.4µA average (14-bit resolution, 3.3V supply), one RH and temperature measurement per second
  • Excellent stability against aging
  • Very low power consumption



Document title Document type Type Date Date
PDF 390 KB Datasheet
PDF 600 KB 日本語 Overview
PDF 368 KB Product Change Notice
PDF 99 KB Product Change Notice
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Design & Development

Boards & Kits

Boards & Kits



Relative Humidity Sensors (RH Sensors)

A brief introduction to Renesas’ relative humidity sensors that offer high accuracy and fast measurement response times, enabling customers to improve overall system performance and feedback control. The humidity sensors feature excellent long-term stability as a result of a robust silicon carbide construction and an innovative design, improving useful lifetime and lowering effective cost.