Overview
Description
The FS1012 comprise a MEMS flow sensor mounted on a circuit board with a flow housing. It features a 6-pin standard header connected directly to the MEMS flow sensor.
The FS1012 is capable of measuring a non-corrosive gas or liquid medium. The sensor utilizes thermopile sensing, which provides an excellent signal-to-noise ratio and is ideal for applications requiring low power. It is highly sensitive at low flow rates with a very fast response time.
The set of upstream and downstream thermopiles can be used independently in a single-ended circuit or connected together in a differential configuration.
Features
- Measures gas or liquid mediums
- Robust solid isolation technology
- No cavity in MEMS sensor to cause clogging
- Resistant to vibration and pressure shock
- Low power application
- Fast response time
- Millivolt output
- Heater supply voltage: 3V to 5V DC
- Operating temperature range: 0°C to +85°C
Comparison
Applications
Documentation
Featured Documentation
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| Type | Title | Date |
| Datasheet | PDF 174 KB | |
| End Of Life Notice | PDF 1.43 MB | |
| Application Note | PDF 135 KB | |
| End Of Life Notice | PDF 1.29 MB | |
| Product Change Notice | PDF 148 KB | |
| Product Brief | PDF 236 KB | |
| White Paper | PDF 478 KB | |
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Design & Development
Support
Support Communities
Get quick technical support online from Renesas Engineering Community technical staff.
Support Communities
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Renesas FS1012-1002-LQ
Hi, I am currently doing a flow sensor using this FS1012-1002-LQ. The maximum units for the flow rate that the sensor can be measured are 1.0 SLPM. However, based on the data sheet given the flow rate was recorded until 0.5SLPM. Is there any detailed table ...
Mar 3, 2023 -
How to use FS1012 Flow sensor
Hi, I have got new FS1012 thermal flow sensor for gas flow sensing. I have only sensor with me, no other MCU or any guide how to interface it. Can some one help me with the selection of MCU and software to be used. I just want to get the ...
Aug 11, 2021 -
Renesas Air Flow Sensor FS1012-1100-NG Reading in SLM
Hi there, I'm using the Renesas Air Flow Sensor FS1012. I've been trying to read my values into an Arduino. So far i've been reading my values in mV. I was wondering if there was a formula or method to convert my values into SLM. Thank you
Apr 22, 2023
FAQs
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FSxxxx - List of liquids and gases to use with flow sensor
We don’t have an approved list, but in general we recommend non-aggressive chemicals and liquids within the pH level 4 to 8, with the parylene coated modules. Most coolants are fine as long as the system they used in does not form coagulants (water impurities, salt, etc).
Jan 1, 2023 -
About Renesas Industrial Measurement Equipment Solutions
Renesas introduces a wide range of products for industrial measurement equipment such as microcontroller products, sensors, operational amplifiers, power supply ICs and communication drivers. Recommended products are introduced on the solution website for each of the typical application equipments, so please refer to them.
Apr 5, 2021 -
FSxxxx - Bidirectional flow
No. All Renesas flow sensors are unidirectional.
Dec 1, 2023