The FS2012 is a high performance and fully calibrated mass flow rate module for non-corrosive gas or liquid flow. It features an accuracy error down to 2% of reading (typical).

The FS2012  comprises a MEMS flow sensor mounted on a circuit board with a flow housing and sensor signal conditioning components. It features a 6-pin standard header for both a fully calibrated analog and digital output (I2C).

The low power, high accuracy, and robustness make the FS2012 an excellent fit for applications such as process controls and monitoring, HVAC, air control systems, respiratory devices and liquid dispensing systems.


  • Fully-calibrated output
  • Measures gas or liquid mediums
  • Robust solid isolation technology
  • No cavity in MEMS sensor to cause clogging
  • Resistant to vibration and pressure shock
  • Supply Voltage: 5V DC
  • Fast response time
  • Operating temperature range: 0°C to +85°C
  • Analog Output: 0V to 5V
  • Digital Output: I2C


製品名 Part Status Description Temp. Range 購入/サンプル
Active Liquid, 0 to 0.5 SLPM 0 to 85°C
Active Liquid, 0 to 1.0 SLPM 0 to 85°C
Active Gas, 0 to 2 SLPM 0 to 85°C
Active Gas, 0 to 10 SLPM 0 to 85°C


タイトル language 分類 形式 サイズ 日付
star FS2012 Datasheet データシート PDF 433 KB
Whitepaper - MEMS Mass Flow Sensor ホワイトペーパー PDF 478 KB
PCN# : 210017 Change PCB Suppliers for Flow Sensors Products 製品変更通知 PDF 148 KB
Sensing Technologies and Sensor Solutions Overview 概要 PDF 5.75 MB
FS10xx/FS2012 High-Performance MEMS Flow Sensor Module Family 製品概要 PDF 236 KB


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