The FS1012 comprise a MEMS flow sensor mounted on a circuit board with a flow housing. It features a 6-pin standard header connected directly to the MEMS flow sensor.

The FS1012 is capable of measuring a non-corrosive gas or liquid medium. The sensor utilizes thermopile sensing, which provides an excellent signal-to-noise ratio and is ideal for applications requiring low power. It is highly sensitive at low flow rates with a very fast response time.

The set of upstream and downstream thermopiles can be used independently in a single-ended circuit or connected together in a differential configuration.


  • Measures gas or liquid mediums
  • Robust solid isolation technology
  • No cavity in MEMS sensor to cause clogging
  • Resistant to vibration and pressure shock
  • Low power application
  • Fast response time
  • Millivolt output
  • Heater supply voltage: 3V to 5V DC
  • Operating temperature range: 0°C to +85°C



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PDF 236 KB Product Brief
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