The FS2012 is a high performance and fully calibrated mass flow rate module for non-corrosive gas or liquid flow. It features an accuracy error down to 2% of reading (typical).

The FS2012  comprises a MEMS flow sensor mounted on a circuit board with a flow housing and sensor signal conditioning components. It features a 6-pin standard header for both a fully calibrated analog and digital output (I2C).

The low power, high accuracy, and robustness make the FS2012 an excellent fit for applications such as process controls and monitoring, HVAC, air control systems, respiratory devices and liquid dispensing systems.


  • Fully-calibrated output
  • Measures gas or liquid mediums
  • Robust solid isolation technology
  • No cavity in MEMS sensor to cause clogging
  • Resistant to vibration and pressure shock
  • Supply Voltage: 5V DC
  • Fast response time
  • Operating temperature range: 0°C to +85°C
  • Analog Output: 0V to 5V
  • Digital Output: I2C

Product Options

Part Number Part Status Description Temp. Range Buy Sample
Active Liquid, 0 to 0.5 SLPM 0 to 85°C
Active Liquid, 0 to 1.0 SLPM 0 to 85°C
Active Gas, 0 to 2 SLPM 0 to 85°C
Active Gas, 0 to 10 SLPM 0 to 85°C


Title language Type Format File Size Date
Datasheets & Errata
FS2012 Datasheet Datasheet PDF 433 KB
Application Notes & White Papers
Whitepaper - MEMS Mass Flow Sensor White Paper PDF 478 KB
Sensing Technologies and Sensor Solutions Overview Overview PDF 5.75 MB
FS10xx/FS2012 High-Performance MEMS Flow Sensor Module Family Product Brief PDF 236 KB

Boards & Kits

Part Number Title Type Company
SDAF0x Mass Flow Sensor Evaluation Kit Evaluation Renesas