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Mass flow controllers measure the mass and flow rate of a fluid, as well as control the flow rate. These are used for gas control of semiconductor manufacturing equipment and burners. The RX72M 32-bit microcontroller (MCU) has a large amount of built-in memory and EtherCAT and control area network (CAN) interfaces. With this reference design, the system control and industrial network can be controlled with one chip.
System Benefits
System Block Diagram
Product | Description | Featured Document | Ordering |
---|---|---|---|
Microcontroller | |||
RX72M | High-performance 32-bit microcontroller for industrial network solutions | Datasheet | Select Specific Device |
Buck Regulator | |||
ISL85410 | Wide VIN 1A Synchronous Buck Regulator | Datasheet | Buy/Sample |
Sensor | |||
FS1012 | Gas or Liquid Flow Sensor Module | Datasheet | Buy/Sample |
Op Amp | |||
ISL28134 | 5V Ultra-Low Noise, Zero Drift Rail-to-Rail Precision Op Amp | Datasheet | Buy/Sample |
Transceiver | |||
ISL32452E | ±60V Fault Protected, 3.3V to 5V, ±20V CMR, 250kbps Half-duplex RS-485/RS-422, ±15kV ESD | Datasheet | Buy/Sample |
EEPROM | |||
R1EX24016ATAS0I | Two-wire serial interface 16k EEPROM (2-kword × 8-bit) | Datasheet | Buy/Sample |