The FS1012 comprise a MEMS flow sensor mounted on a circuit board with a flow housing. It features a 6-pin standard header connected directly to the MEMS flow sensor.

The FS1012 is capable of measuring a non-corrosive gas or liquid medium. The sensor utilizes thermopile sensing, which provides an excellent signal-to-noise ratio and is ideal for applications requiring low power. It is highly sensitive at low flow rates with a very fast response time.

The set of upstream and downstream thermopiles can be used independently in a single-ended circuit or connected together in a differential configuration.


  • Measures gas or liquid mediums
  • Robust solid isolation technology
  • No cavity in MEMS sensor to cause clogging
  • Resistant to vibration and pressure shock
  • Low power application
  • Fast response time
  • Millivolt output
  • Heater supply voltage: 3V to 5V DC
  • Operating temperature range: 0°C to +85°C


タイトル language 分類 形式 サイズ 日付
star FS1012 Datasheet データシート PDF 385 KB
Whitepaper - MEMS Mass Flow Sensor ホワイトペーパー PDF 478 KB
PCN# : 210017 Change PCB Suppliers for Flow Sensors Products 製品変更通知 PDF 148 KB
FS10xx/FS2012 High-Performance MEMS Flow Sensor Module Family 製品概要 PDF 236 KB



製品名 タイトル 分類 会社名
SDAF0x Mass Flow Sensor Evaluation Kit Evaluation Renesas