The FS1025 comprise a MEMS flow sensor mounted on a circuit board with an amplification circuit and a flow housing.

The FS1025 is capable of measuring liquid mediums. The sensor utilizes thermopile sensing, which provides an excellent signal-to-noise ratio and is ideal for applications requiring low power. It is highly sensitive at low flow rates with a very fast response time.

The set of upstream and downstream thermopiles can be used independently in a single-ended circuit or connected together in a differential configuration. Each upstream and downstream thermopiles are connected to an amplifier with a 0V to 4.5V output.


  • Measures liquid mediums
  • Robust solid isolation technology
  • No cavity in MEMS sensor to cause clogging
  • Resistant to vibration and pressure shock
  • Low power application
  • Fast response time
  • 0V to 4.5V output
  • Supply voltage: 5V DC
  • Operating temperature range: 0°C to +85°C


タイトル language 分類 形式 サイズ 日付
star FS1025 Datasheet データシート PDF 170 KB
FS10xx/FS2012 High-Performance MEMS Flow Sensor Module Family 製品概要 PDF 236 KB



製品名 タイトル 分類 会社名
SDAF0x Mass Flow Sensor Evaluation Kit Evaluation Renesas